By Yang J.T., Yang J.N.
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Electron. 11, 232–240 (2005) 3, 10 9. P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. V. Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. Van Thourhout, R. Baets, Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography. Photon. Technol. Lett. 16, 1328–1330 (2004) 3, 9 1 Silicon Photonic Wire Waveguides: Fundamentals and Applications 27 10. A. J. McNab, Losses in single-mode silicon-on-insulator strip waveguides and bends. Opt. Express 12, 1622–1631 (2004) 3, 13 11.
20a, the waveguide is a rib-type one with a 600 × 200-nm2 core and 100-nm-thick slab. This structure satisfies the single-mode condition for 1,550nm infrared light. The slab is thicker than those reported in  and . The thick slab is important for reducing propagation loss and device impedance. The core was fabricated in same manner as for passive waveguides. After thermal oxidation for surface passivation, the n+ and p+ regions were defined in the slab section by lithography and implanted with phosphorus and boron as dopants.
Van Thourhout, D. Taillaert, P. Jaenen, J. Wouters, S. Beckx, V. Wiaux, R. Baets, Compact wavelength-selective functions in silicon-on-insulator photonic wires. IEEE J. Sel. Top. Quantum. Electron. 12, 1394–1401 (2006) 6, 14 17. P. R. Lacey, A theoretical analysis of scattering loss from planar optical wavewguide. Opt. Quantum. Electron. 26, 977–986 (1994) 7 18. S. Janz, in Silicon-Based Waveguide Technology for Wavelength Division Multiplexing, ed. by L. Pavesi, D. Lockwood. Silicon Photonics.